采用激光光源，实现更高功率，比LED光效更高 激光光源光学扩展量小，成像焦深大，对比度高 ηTM结构专利设计，具有更紧凑的尺寸，便于设备配置多个扫描引擎，实现更大尺寸和更高分辨率的曝光图像； 光纤耦合激光光源重量轻，可实现DLP引擎的高速运动和快速曝光； 采用了多波长光源，通过调节各波长输出配比，可控制曝光光刻胶的侧壁形貌。
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