Quality Control and Standardization of Additively Manufactured Components in the Semiconductor Industry
【Abstract】
1.Stringent Quality Requirements for AM Components in the Semiconductor Industry
2.ASML’s Approach: Tiered Classification and End-to-End Quality Control
3.Integration of International Standards and Development of Semiconductor-Specific Specifications
4.Future Outlook: Digitalization, Traceability, and High-Reliability Manufacturing
【Bio】
Zhao Renjie holds a Ph.D. from Shanghai Jiao Tong University, and serves as an Adjunct Professor at Shanghai University of Engineering Science. With nine years of experience in lithography equipment R&D, he has promoted the application of advanced manufacturing components across more than 5,000-part types. He possesses deep expertise in the design methodologies and manufacturing processes for various structural, fluidic, and thermal components, and has a thorough understanding of design specifications and application requirements for critical semiconductor parts. He has filed over 40 patents.